Single-use MEMS sealing valve with integrated actuation for ultra low-leak vacuum applications
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0960-1317/24/i=10/a=105011/pdf
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1. Pressure control system for vacuum MEMS;Vacuum;2020-08
2. Active microvalve driven by electro-conjugate fluid jet flow with a hydraulic power source on a chip;Journal of Micromechanics and Microengineering;2020-07-22
3. Compact, planar, translational piezoelectric bimorph actuator with Archimedes’ spiral actuating tethers;Journal of Micromechanics and Microengineering;2016-10-14
4. Development of a fast thermal response microfluidic system using liquid metal;Journal of Micromechanics and Microengineering;2016-06-06
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