Nonlinearity in micromechanical free–free beam resonators: modeling and experimental verification-Reference-Cited by-同舟云学术

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Nonlinearity in micromechanical free–free beam resonators: modeling and experimental verification

Published:2008-01-04 Issue:2 Volume:18 Page:025017
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Shao L C,Palaniapan M,Tan W W,Khine L

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference26 articles.

1. Nonlinear Limits for Single-Crystal Silicon Microresonators

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