Characterization and modeling of a piezoelectric micromachined ultrasonic transducer with a very large length/width aspect ratio-Reference-Cited by-同舟云学术

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Characterization and modeling of a piezoelectric micromachined ultrasonic transducer with a very large length/width aspect ratio

Published:2008-01-17 Issue:2 Volume:18 Page:025037
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Choi H S,Ding J L,Bandyopadhyay A,Anderson M J,Bose S

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference28 articles.

1. Micromachined high frequency ferroelectric sonar transducers

2. PZT thin films integration for the realisation of a high sensitivity pressure microsensor based on a vibrating membrane

3. Fabrication of ultrasonic arrays with 7μm PZT thick films as ultrasonic emitter for object detection in air

4. Design of novel thin-film piezoelectric accelerometer

5. Development of piezoelectric micromachined ultrasonic transducers

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4. 10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization;Sensors;2020-08-04

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