Near-zero curvature fabrication of miniaturized micromechanical Ni switches using electron beam cross-linked PMMA-Reference-Cited by-同舟云学术

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Near-zero curvature fabrication of miniaturized micromechanical Ni switches using electron beam cross-linked PMMA

Published:2003-05-14 Issue:5 Volume:13 Page:591-598
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Teh W H,Luo J K,Graham M R,Pavlov A,Smith C G

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference26 articles.

1. The physics and fabrication of ultra-thin free-standing wires

2. Electric field heating of supported and free-standing AuPd fine wires

3. Fabrication of submicrometer freestanding single-crystal gallium arsenide and silicon structures for quantum transport studies

4. Fabrication and electrical, mechanical and thermal properties of sub-micron free-standing devices

5. Sub-surface imaging with the magnetic resonance force microscope

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