Wet and dry etching techniques for the release of sub-micrometre perforated membranes-Reference-Cited by-同舟云学术

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Wet and dry etching techniques for the release of sub-micrometre perforated membranes

Published:2000-05-23 Issue:2 Volume:10 Page:171-174
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Kuiper Stein,Boer Meint de,Rijn Cees van,Nijdam Wietze,Krijnen Gijs,Elwenspoek Miko

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Development and applications of very high flux microfiltration membranes

2. LPCVD silicon‐rich silicon nitride films for applications in micromechanics, studied with statistical experimental design*

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