Comb-drive GaN micro-mirror on a GaN-on-silicon platform-Reference-Cited by-同舟云学术

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Comb-drive GaN micro-mirror on a GaN-on-silicon platform

Published:2011-02-15 Issue:3 Volume:21 Page:035012
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Wang Yongjin,Sasaki Takashi,Wu Tong,Hu Fangren,Hane Kazuhiro

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications

2. Lasing in GaN microdisks pivoted on Si

3. Fabrication of GaN cantilevers on silicon substrates for microelectromechanical devices

4. Fabrication of GaN suspended photonic crystal membranes and resonant nanocavities on Si(111)

5. Fabrication of deeply undercut GaN-based microdisk structures on silicon platforms

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabrication of GaN cantilever on GaN substrate by photo-electrochemical etching;Applied Physics Express;2021-02-24

2. InGaN/GaN micro mirror with electrostatic comb drive actuation integrated on a patterned silicon-on-insulator wafer;Optics Express;2018-03-15

3. Free-standing GaN grating couplers and rib waveguide for planar photonics at telecommunication wavelength;Optics & Laser Technology;2018-01

4. Spatial Audio Acquisition Using a Dual-Functioning MQW-Diode With a Three-Stage Amplifier Circuit;IEEE Access;2018

5. Light Induced Synaptic Transistor With Dual Operation Modes;IEEE Electron Device Letters;2016-11

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