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Physical principles and miniaturization of spark assisted chemical engraving (SACE)

  • Published:2005-09-06 Issue:10 Volume:15 Page:S268-S275
  • ISSN:0960-1317
  • Container-title:Journal of Micromechanics and Microengineering
  • language:
  • Short-container-title:J. Micromech. Microeng.

Author:

Wüthrich R,Hof L A,Lal A,Fujisaki K,Bleuler H,Mandin Ph,Picard G

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

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