A micromirror module using a MEMS digital-to-analog converter and its application for optical surface profiling
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference26 articles.
1. The Evolution of MEMS Displays
2. Modeling, Design, Fabrication, and Demonstration of a Digital Micromirror With Interdigitated Cantilevers
3. A two axes scanning SOI MEMS micromirror for endoscopic bioimaging
4. An Electrothermal Tip–Tilt–Piston Micromirror Based on Folded Dual S-Shaped Bimorphs
5. A low-voltage three-axis electromagnetically actuated micromirror for fine alignment among optical devices
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1. Large Displacement Actuators With Multi-Point Stability for a MEMS-Driven THz Beam Steering Concept;Journal of Microelectromechanical Systems;2023-04
2. 3-Bit Digital-to-Analog Converter with Mechanical Amplifier for Binary Encoded Large Displacements;Actuators;2021-08-04
3. Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene Spring Structures;Sensors;2015-08-28
4. A Low-Actuation-Voltage MEMS Digital-to-Analog Converter for a White-Light Interferometry System;Procedia Engineering;2011
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