Modeling, Design, Fabrication, and Demonstration of a Digital Micromirror With Interdigitated Cantilevers-Reference-Cited by-同舟云学术

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Modeling, Design, Fabrication, and Demonstration of a Digital Micromirror With Interdigitated Cantilevers

Published:2009-12 Issue:6 Volume:18 Page:1382-1395
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Dae-Hyun Kim ,Min-Wu Kim ,Jin-Wan Jeon ,Koeng Su Lim ,Jun-Bo Yoon

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/5338501/05286280.pdf?arnumber=5286280

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A COMSOL novel micromirror matrix model for digital image display;Engineering Research Express;2024-03-01

2. Effect of Pressure and Squeezed-film Damping on Transient Response of a Double-Bridge Micromirror for Multiobject Spectroscopy;Indian Journal of Pure & Applied Physics;2024

3. Design and simulation of a wide-range variable MEMS capacitor using electrostatic and piezoelectric actuators;Microsystem Technologies;2023-07

4. Design and Development of a Double-Bridge Micromirror With Bending and Twisting Cantilevers for Multiobject Spectroscopy;IEEE Transactions on Electron Devices;2020-10

5. Micro-optical Components for Bioimaging on Tissues, Cells and Subcellular Structures;Micromachines;2019-06-19

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