A single-sided micromachined piezoresistive SiO2cantilever sensor for ultra-sensitive detection of gaseous chemicals
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference25 articles.
1. Surface Stress in the Self-Assembly of Alkanethiols on Gold
2. Translating Biomolecular Recognition into Nanomechanics
3. Smart single-chip gas sensor microsystem
4. Thermal and ambient‐induced deflections of scanning force microscope cantilevers
5. Cantilever transducers as a platform for chemical and biological sensors
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