An optimized one-step wet etching process of Pb(Zr0.52Ti0.48)O3thin films for microelectromechanical system applications
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
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2. Selective Growth and Micropatterning Technique for Oxide Thin Films by Sacrificial a-CaO Layer;ECS Journal of Solid State Science and Technology;2021-08-01
3. Piezoelectric MEMS based acoustic sensors: A review;Sensors and Actuators A: Physical;2020-01
4. A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT;2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII);2019-06
5. A one-step residue-free wet etching process of ceramic PZT for piezoelectric transducers;Sensors and Actuators A: Physical;2019-05
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