Design and characterization of a dual-stage, thermally actuated nanopositioner
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference51 articles.
1. Design, fabrication, and real-time neural network control of a three-degrees-of-freedom nanopositioner
2. Piezodriven 50‐μm range stage with subnanometer resolution
3. Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism
4. Design, fabrication, position sensing, and control of an electrostatically-driven polysilicon microactuator
5. High-bandwidth high-accuracy rotary microactuators for magnetic hard disk drive tracking servos
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