Piezoelectric transduction of flexural modes in pre-stressed microbeam resonators-Reference-Cited by-同舟云学术

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Piezoelectric transduction of flexural modes in pre-stressed microbeam resonators

Published:2014-07-29 Issue:8 Volume:24 Page:085014
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Torri G B,Janssen N M A,Zeng Z,Rottenberg X,Karabacak D M,Vandecasteele M,Hoof C Van,Puers R,Tilmans H A C

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/24/i=8/a=085014/pdf

Reference26 articles.

1. Micro resonant force gauges

2. Micro- and nanomechanical sensors for environmental, chemical, and biological detection

3. Enhanced sensitivity volatile detection with low power integrated micromechanical resonators

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1. Piezoelectric MEMS Resonators: A Review;IEEE Sensors Journal;2021-06-01

2. A critical review of reduced one-dimensional beam models of piezoelectric composite beams;Journal of Intelligent Material Systems and Structures;2019-03-12

3. Improved analytical modelling and finite element verification of stressed GaN microbeam resonators by piezoelectric actuation;Journal of Micromechanics and Microengineering;2017-07-21

4. Gallium nitride MEMS resonators: how residual stress impacts design and performances;Microsystem Technologies;2017-01-27

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