Transfer of a continuous-relief lenticular array onto a quartz substrate by using SIL combined with the dry-etching method-Reference-Cited by-同舟云学术

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Transfer of a continuous-relief lenticular array onto a quartz substrate by using SIL combined with the dry-etching method

Published:2013-02-01 Issue:3 Volume:23 Page:035021
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Deng Qing-Long,Chen Chien-Yue,Lin Wei-Li,Shew Bor-Yuan,Chiang Donyau,Tang Yu-Hsiang,Lin Bor-Shyh

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/23/i=3/a=035021/pdf

Reference17 articles.

1. Inductively coupled plasma etching of SiO2 layers for planar lightwave circuits

2. Quartz-Blazed Grating Applied on Autostereoscopic Display

3. Cost-effective mass fabrication of multilevel diffractive optical elements by use of a single optical exposure with a gray-scale mask on high-energy beam-sensitive glass

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