Abstract
Abstract
The morphologies of dislocation etch pits and dislocation deflections of on-axis 4H-SiC substrate etched by molten KOH were observed with the help of a microscope. Based on experimental observation and etch mechanism, a method for the identification of threading edge dislocations, threading screw dislocations (TSDs) and threading mixed dislocations was proposed. The details about the inner micro-structure of threading edge dislocations and TSDs were observed by laser scanning confocal microscope and scanning electron microscopy. The morphologies and the cross-sectional views of the basal plane dislocation formed by threading edge dislocation were observed and two models were formed to explain it.
Funder
National Natural Science Foundation of China
Natural Science Foundation of Shandong Province
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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