Semi-analytic model for the calculation of large-angle bending of electrostatically actuated cantilevers-Reference-Cited by-同舟云学术

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Semi-analytic model for the calculation of large-angle bending of electrostatically actuated cantilevers

Published:2020-07-29 Issue:3 Volume:2 Page:035012
ISSN:2631-8695
Container-title:Engineering Research Express
language:
Short-container-title:Eng. Res. Express

Author:

Sokoluk Dominik^ORCID,Kappa Jan,Rahm Marco

Publisher

IOP Publishing

Subject

General Engineering

Link

https://iopscience.iop.org/article/10.1088/2631-8695/aba4b8/pdf

Reference33 articles.

1. The two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy

2. Energy Harvesting Technologies

3. Electrically Reconfigurable Micromirror Array for Direct Spatial Light Modulation of Terahertz Waves over a Bandwidth Wider Than 1 THz

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