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The two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy

  • Published:2013-03-26 Issue:5 Volume:23 Page:055009
  • ISSN:0960-1317
  • Container-title:Journal of Micromechanics and Microengineering
  • language:
  • Short-container-title:J. Micromech. Microeng.

Author:

Canonica M D,Zamkotsian F,Lanzoni P,Noell W,de Rooij N

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Cited by 27 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. MOEMS for Space Applications: The Challenge of Multi-Wafer Bonding;2024 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP);2024-06-02

2. Combining representation formalisms for reasoning upon mathematical knowledge;Proceedings of the 12th Knowledge Capture Conference 2023;2023-12-05

3. Convex blazed gratings for high throughput spectrographs in space missions;International Conference on Space Optics — ICSO 2022;2023-07-12

4. Blazed gratings on convex substrates for high throughput spectrographs;Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation V;2022-08-29

5. MEMS-based linear micromirror array with a high filling factor for spatial light modulation;Optics Express;2021-09-30
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