Tunable, membrane-based, pneumatic micro-mirrors
Author:
Publisher
IOP Publishing
Subject
Atomic and Molecular Physics, and Optics
Reference10 articles.
1. A design methodology for a bulk-micromachined two-dimensional electrostatic torsion micromirror
2. Micromachined electromagnetic scanning mirrors
3. Endoscopic optical coherence tomography with new MEMS mirror
4. Tunable, membrane-based, pneumatic micro-mirrors
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