Process-dependent mechanical and optical properties of nanostructured silicon carbonitride thin films
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering
Link
http://iopscience.iop.org/article/10.1088/1361-6528/ab180c/pdf
Reference41 articles.
1. Silicon nanostructures for photonics and photovoltaics
2. Effect of Radiation on a Mach–Zehnder Interferometer Silicon Modulator for HL-LHC Data Transmission Applications
3. New CMOS-compatible platforms based on silicon nitride and Hydex for nonlinear optics
4. Silicon carbonitride: a rival to cubic boron nitride
5. Low-dimensional SiC nanostructures: Fabrication, luminescence, and electrical properties
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