A self-ordered, body-centered tetragonal superlattice of SiGe nanodot growth by reduced pressure CVD
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering
Link
http://iopscience.iop.org/article/10.1088/1361-6528/aa91c1/pdf
Reference30 articles.
1. Growth of SiGe/Si superlattices on silicon-on-insulator substrates for multi-bridge channel field effect transistors
2. Self-organized growth of Ge quantum dots on Si(001) substrates induced by sub-monolayer C coverages
3. Properties and applications of SiGe nanodots
4. Impact of impurity doping into Si quantum dots with Ge core on their electrical charging characteristics
5. Novel Si–Ge–C superlattices and their applications
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1. Electron emission from alignment-controlled multiple stacks of SiGe nanodots embedded in Si structures;Materials Science in Semiconductor Processing;2024-05
2. Strain and optical characteristics analyses of three-dimentional self-ordered multilayered SiGe nanodots by photoluminescence and Raman spectroscopy;Japanese Journal of Applied Physics;2024-02-16
3. Three-Dimensional Self-Ordered Multilayered Ge Nanodots on SiGe;ECS Journal of Solid State Science and Technology;2023-05-01
4. Heteroepitaxy of group IV materials for future device application;Japanese Journal of Applied Physics;2023-02-09
5. Vertical alignment control of self-ordered multilayered Ge nanodots on SiGe;Japanese Journal of Applied Physics;2023-02-07
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