Analytical Modelling and FEM Simulation of Capacitive Pressure Sensor for Intraocular Pressure Sensing
Author:
Publisher
IOP Publishing
Subject
General Medicine
Link
http://stacks.iop.org/1757-899X/404/i=1/a=012026/pdf
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1. Design principles and considerations for the ‘ideal’ silicon piezoresistive pressure sensor: a focused review
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