Parameter optimization of MEMS capacitive pressure sensor for higher sensitivity-Reference-Cited by-同舟云学术

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Parameter optimization of MEMS capacitive pressure sensor for higher sensitivity

Published:2023 Issue: Volume: Page:
ISSN:0094-243X
Container-title:2ND INTERNATIONAL CONFERENCE ON MATERIALS FOR ENERGY AND ENVIRONMENT 2020
language:
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Author:

Ananthi S.,Chaudhary Himanshu,Singh Kulwant

Publisher

AIP Publishing

Link

http://aip.scitation.org/doi/pdf/10.1063/5.0135964

Reference19 articles.

1. K. Balavalad and B. Sheeparamatti. A: critical review of mems capacitive pressure sensors. Sensors Transducers, 187:120–128, 04 2015.

2. P. Eswaran and S. Malarvizhi.: Mems capacitive pressure sensors: a review on recent development and prospective. 2013.

3. Fabrication of electron beam physical vapor deposited polysilicon piezoresistive MEMS pressure sensor

4. Material selection for optimum design of MEMS pressure sensors

5. Materials selection in conceptual design

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