Dynamic NMR Study of Model CMP Slurry Containing Silica Particles as Abrasives
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Published:2018-02
Issue:
Volume:305
Page:012023
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ISSN:1757-8981
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Container-title:IOP Conference Series: Materials Science and Engineering
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language:
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Short-container-title:IOP Conf. Ser.: Mater. Sci. Eng.
Author:
Odeh F,Al-Bawab A,Li Y