Ferroelectric and piezoelectric thin films and their applications for integrated capacitors, piezoelectric ultrasound transducers and piezoelectric switches-Reference-Cited by-同舟云学术

Ferroelectric and piezoelectric thin films and their applications for integrated capacitors, piezoelectric ultrasound transducers and piezoelectric switches

Published:2010-02-01 Issue: Volume:8 Page:012008
ISSN:1757-899X
Container-title:IOP Conference Series: Materials Science and Engineering
language:
Short-container-title:IOP Conf. Ser.: Mater. Sci. Eng.

Author:

Klee M,Boots H,Kumar B,Heesch C van,Mauczok R,Keur W,Wild M de,Esch H van,Roest A L,Reimann K,Leuken L van,Wunnicke O,Zhao J,Schmitz G,Mienkina M,Mleczko M,Tiggelman M

Publisher

IOP Publishing

Subject

General Medicine

Link

http://stacks.iop.org/1757-899X/8/i=1/a=012008/pdf

Reference13 articles.

1. Ferroelectric thin films for integrated passive components

2. Embedded thin film capacitors-theoretical limits

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