Comparison of microwave and probe methods of plasma diagnostics
Author:
Publisher
IOP Publishing
Subject
General Engineering
Link
https://iopscience.iop.org/article/10.1088/0508-3443/17/11/417/pdf
Reference18 articles.
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2. Methods of Measuring the Properties of Ionized Gases at High Frequencies. III. Measurement of Discharge Admittance and Electron Density
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2. Comparison of electron‐density measurements made using a Langmuir probe and microwave interferometer in the Gaseous Electronics Conference reference reactor;Journal of Applied Physics;1993-10
3. Measurement of electron densities by a microwave cavity method in 13.56-MHz RF plasmas of Ar, CF4, C2F6, and CHF3;Plasma Chemistry and Plasma Processing;1991-09
4. WITHDRAWN: Diagnostics of Plasmas for Materials Processing;Plasma Etching;1989
5. A Microwave Interferometer for Density Measurement and Stabilization in Process Plasmas;MRS Proceedings;1988
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