Chemical sputtering of carbon films by simultaneous irradiation with argon ions and molecular oxygen
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Reference68 articles.
1. Oxygen plasma etching for resist stripping and multilayer lithography
2. Effects of plasma etching on DLC films
3. Etching of DLC films using a low intensity oxygen plasma jet
4. Patterning of organic thin film transistors by oxygen plasma etch
5. Pattern transfer using poly(styrene-block-methyl methacrylate) copolymer films and reactive ion etching
Cited by 32 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A comparison between ion irradiation assisted- and electron irradiation assisted-oxygen plasma treatment on modification of nanostructured carbon films;Surface and Coatings Technology;2023-08
2. Benchmarking screening assays using ambient mass spectrometry;Smartphones for Chemical Analysis: From Proof-of-concept to Analytical Applications;2023
3. Density Functional Theory Study of Oxygen Adsorption on Polymer Surfaces for Atomic-Layer Etching: Implications for Semiconductor Device Fabrication;ACS Applied Nano Materials;2020-05-04
4. Reactive ion beam stripping process for diamond coated cutting tools reconditioning;Surface and Coatings Technology;2019-11
5. Solid carbon active screen plasma nitrocarburizing of AISI 316L stainless steel: Influence of N2-H2 gas composition on structure and properties of expanded austenite;Surface and Coatings Technology;2019-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3