Vibrational excitation of CF4by electron impact: a computational analysis
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Reference33 articles.
1. Electron Interactions with CF4
2. A kinetic study of the plasma‐etching process. I. A model for the etching of Si and SiO2in CnFm/H2and CnFm/O2plasmas
3. Crossed-beam experiment for the scattering of low energy electrons from CF4
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