Metal-assisted chemical etching using sputtered gold: a simple route to black silicon
Author:
Publisher
Informa UK Limited
Subject
General Materials Science
Link
http://www.tandfonline.com/doi/pdf/10.1088/1468-6996/12/4/045001
Reference13 articles.
1. Porous silicon formation: A quantum wire effect
2. Formation Mechanism and Properties of Electrochemically Etched Trenches in n‐Type Silicon
3. X-ray topographic characterization of porous silicon layers
4. Silicon Porosification: State of the Art
5. Metal-assisted chemical etching in HF/H2O2 produces porous silicon
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