Author:
Strunin V I,Lyakhov A A,Khudaibergenov G Zh
Abstract
Abstract
The effect of the composition of the gas feed mixture on the dissociation rate constant of molecular nitrogen is examined by numerical solving the Boltzmann equation written in a two-term approximation for conditions corresponding to nitride aluminum films deposition. By solving of macroscopic balance equations in volume occupied with plasmas of stationary low-pressure glow discharge in a nitrogen-argon mixture the atomic nitrogen density was determined. It’s shown that there is a maximum of atomic nitrogen density at certain stoichiometry of gas feed mixture.
Subject
General Physics and Astronomy