Deposition of ultrathin AlN films for high frequency electroacoustic devices-Reference-Cited by-同舟云学术

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Deposition of ultrathin AlN films for high frequency electroacoustic devices

Published:2011-03 Issue:2 Volume:29 Page:021014
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Felmetsger Valery V.,Laptev Pavel N.,Graham Roger J.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3554718

Cited by 41 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ultrathin Pyroelectric Photodetector with Integrated Polarization-Sensing Metasurface;Nano Letters;2023-09-06

2. 3.3 GHz BAW Resonators Fabricated on Single Crystal AlN Templates;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03

3. Unfolding the Effects of Cobalt-60 Irradiation on Contour-Mode Piezoelectric Resonators;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03

4. Effects of Gamma Ray Radiation on the Performance of Microelectromechanical Resonators;Advanced Engineering Materials;2023-06-19

5. Study of the Performance Enhancement of Sc-Doped AlN Super High Frequency Cross-Sectional Lamé Mode Resonators;Micromachines;2023-02-23

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