Methods to improve the sensitivity of micro-capacitive pressure sensors

Abstract

Abstract Novel micro pressure sensors require high sensitivity, anti-interference, reliability and durability. However, due to some problems in mold making, digital signal process circuits and so on, it is difficult for the existing micro-capacitive pressure sensors to make a breakthrough in sensitivity. Firstly, this paper briefly introduces the micro-pressure capacitive sensors principle and the technical difficulties they face. After that, several schemes are listed, including digital signal process circuits, laser-induced graphene, etc. The feasibility and practicability of these methods to improve the sensitivity of micro-capacitive pressure sensors are compared and demonstrated. The following types of pressure sensors, including PDMS-based and MEMS-based pressure sensors, have their specific functions and shortcomings. The paper aims to provide some references for further research in this field, and to give some useful opinions on the practical application of micro-capacitive pressure sensors in IoT and other fields.