Fabrication of boron doped diamond cantilevers by means of dry ICP etching

Author:

Vojs M,Marton M,Jančo M,Behúl M,Řeháček V,Michniak P,Držík M,Redhammer R

Abstract

Abstract This paper is focused on the preparation of boron doped diamond (BDD) cantilevers for MEMS applications. Hot filament CVD diamond deposition technique was used for preparation of highly boron doped thin film. The fabrication process consisted only of dry etching steps and masking process, no wet etching of substrate was used. Therefore, it was necessary to optimize both anisotropic and isotropic etching to release the cantilever structure from silicon substrate. Doped diamond cantilevers were etched by reactive ion etching using inductively coupled plasma (ICP RIE) through aluminum etching masks. The optimal properties of fabrication process led to high quality MEMS structures. The resulting cantilevers were investigated by scanning electron microscopy (SEM) and laser vibrometer system. Finally, we demonstrate a BDD cantilever (5 μm width) with the main resonant frequencies at 22.2 kHz, 46.6 kHz, 52.2 kHz and 65.6 kHz.

Publisher

IOP Publishing

Subject

General Physics and Astronomy

Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3