Interpretation of electron beam induced charging of oxide layers in a transistor studied using electron holography
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/209/i=1/a=012064/pdf
Reference2 articles.
1. Conventional and back-side focused ion beam milling for off-axis electron holography of electrostatic potentials in transistors
2. Electron Holography of Long-Range Electrostatic Fields
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3. Publisher’s note;Ultramicroscopy;2017-06
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5. Secondary electron effect on electron beam induced charging of SiO2particle analyzed by electron holography;Microscopy;2017-01-17
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