Flexible conformal force-sensitive electrode based on the micro-pyramid structure

Abstract

Abstract Currently, pressure sensor technology is developing rapidly and has been integrated into all aspects of human scientific and technological activities. For pressure sensors, device performance is often significantly improved when different force-sensitive layers and microstructures are combined. The material selection of the force-sensitive layer and the structural design of the sensor are the vital factors to determine its performance. In this work, we combine micro-pyramidal polydimethylsilanes (PDMS) with force-sensitive layers of four different materials: Au, rGO (reduced Graphene Oxide), GNWs (Graphene Nano Walls) and CNTs (Carbon Nanotubes). GNWs were combined with the Au force-sensitive layer to form a new structural system, GAC. In this way, five sensors with different force-sensitive layers were prepared from both structural and material dimensions. Through our tests, GAC achieved the best performance among the five systems. Furthermore, it shows excellent advantages in body, voice, and pressure recognition.