Low temperature growth of ITO transparent conductive oxide layers in oxygen-free environment by RF magnetron sputtering
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/461/i=1/a=012021/pdf
Reference5 articles.
1. Electrical, optical, and structural properties of indium–tin–oxide thin films for organic light-emitting devices
2. High quality ITO thin films grown by dc and RF sputtering without oxygen
3. ITO Films Prepared by Long-throw Magnetron Sputtering without Oxygen Partial Pressure
4. Properties of radio-frequency magnetron sputtered ITO films without in-situ substrate heating and post-deposition annealing
5. Use of the ring gap plasmatron for high rate sputtering
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