Using the Finite Elements Method (FEM) for Nanotechnology Education. A rectangular cantilever as a mass sensor

Abstract

The Finite Element Method FEM can be used in the context of physics engineering education, particularly in nanotechnology training. Cantilevers and cantilevers arrays have been implemented as sensors within lots of applications. In the present paper, FEM was used to assess validity of basic models where cantilevers are used as mass sensors. Resonance frequency of a cantilever transversal vibration was found; this was a silicon one-side clamped cantilever. A number of minor mass elements Am was added on the cantilever's free side. Then in each case, a new resonance frequency was found; this led to obtain the Am values from shifts of resonance frequencies. Finally, those values were compared with CAD model values.