Study on temperature influence of an electrothermally excited MEMS resonant sensor based on finite element method-Reference-Cited by-同舟云学术

Study on temperature influence of an electrothermally excited MEMS resonant sensor based on finite element method

Published:2020-10-20 Issue:7 Volume:27 Page:2705-2714
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Shi Huichao,Zhu Guojun,Cao Le,Fan Shangchun

Funder

National Key Research and Development Project of china

National Natural Science Foundation of China

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://link.springer.com/content/pdf/10.1007/s00542-020-05060-9.pdf

Reference18 articles.

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2. Baquero AH (2015) Using the finite elements method (FEM) for nanotechnology education. A rectangular cantilever as a mass sensor. J Phys Conf Ser 582(1):012042. https://doi.org/10.1088/1742-6596/582/1/012042

3. Chen DY (2002) Research on micromechanical resonant beam pressure sensor. Doctorate dissertation of Graduate School of Chinese Academy of Sciences (in Chinese)

4. Didace E (2011) Thermal-electromechanical FEM-BEM model for MEMS resonator simulation. J Microelectromech Syst 20(1):184–192. https://doi.org/10.1109/JMEMS.2010.2100021

5. Fan S, Liu G, Lee MH (1997) Finite-element modelling and simulation on frequency characteristics of the silicon beam resonator attached to an e-type round diaphragm for measuring the concentrated force. Sens Actuators A 63(3):169–176. https://doi.org/10.1016/s0924-4247(97)80501-8

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