Phase-Sensitive Optical Coherence Microscopy of Integrated Nanophotonics Devices

Abstract

Abstract We report on the development of a new approach for studying the internal structure of polymer integrated nanophotonics devices using phase-sensitive optical coherence microscopy. Visualization and flaw detection of devices and their internal structure was carried out using the example of coupling gratings and prisms for a miniature Otto configuration with a characteristic gap height of 50-300 nm.