Plasma diagnostics during deposition of Zr-B-N coatings by magnetron sputtering of UHTC ceramic in DCMS and HIPIMS modes

Abstract

Abstract In this work, plasma diagnostics during the deposition of Zr-B-N coatings by DCMS and HIPIMS methods were carried out, the structural characteristics and growth rates of the obtained coatings were investigated; the regularities of the influence of the working atmosphere on the composition of the plasma, as well as on the thickness and growth rate of the coatings are revealed. It was found that the introduction of nitrogen leads to a decrease in the concentration of Zr and B ions in the plasma, as a result of which the growth rate of the coatings decreases. Note that, when using the DCMS method, predominantly argon plasma is observed, while with HIPIMS, the plasma is characterized by a large number of metal ions.