Author:
Gurin Sergey,Pecherskaya Ekaterina,Novichkov Maksim,Safronova Olga
Abstract
Abstract
The paper presents the main structural and topological solutions, the technology of obtaining and stabilizing multilayer thin-film resistive and tensoresistive structures with temperature self-compensation, which allows achieving a TCR value of no more than ± 1 × 10−6 and an instability of resistance no more than ± (0.01 … 0.02) %.
Subject
General Physics and Astronomy
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