Finite Element Analysis of the Vertical Levitation Force in an Electrostatic MEMS Comb Drive Actuator-Reference-Cited by-同舟云学术

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Finite Element Analysis of the Vertical Levitation Force in an Electrostatic MEMS Comb Drive Actuator

Published:2013-11-29 Issue: Volume:472 Page:012002
ISSN:1742-6588
Container-title:Journal of Physics: Conference Series
language:
Short-container-title:J. Phys.: Conf. Ser.

Author:

Wooldridge J,Blackburn J,Muniz-Piniella A,Stewart M,Shean T A V,Weaver P M,Cain M G

Publisher

IOP Publishing

Subject

General Physics and Astronomy

Link

http://stacks.iop.org/1742-6596/472/i=1/a=012002/pdf

Reference18 articles.

1. New materials for micro-scale sensors and actuators

2. Ferroelectric thin films for micro-sensors and actuators: a review

3. 1.05-GHz CMOS oscillator based on lateral- field-excited piezoelectric AlN contour- mode MEMS resonators

4. Surface micromachined piezoelectric resonant beam filters

5. RF MEMS switches and switch circuits

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. MEMS for Nanopositioning: Design and Applications;Journal of Microelectromechanical Systems;2017-06

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