Surface micromachined piezoelectric resonant beam filters

Author:

Piekarski Brett,DeVoe Don,Dubey Madan,Kaul Roger,Conrad John

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference28 articles.

1. C.T.-C. Nguyen, Micromechanical resonators for oscillators and filters, in: Proceedings of the IEEE International Ultrasonics Symposium, Seattle, WA, 1995, pp. 489–499.

2. C.T. Nguyen, Micromechanical Devices for Wireless Communications, in: Proceedings of the 1998 IEEE Micro Electro Mechanical Systems Workshop, Heidelberg, Germany, 1998.

3. L. Lin, R.T. Howe, A.P. Pisano, Microelectromechanical filters for signal processing, J. Microelectromech. Syst. 7 (1998).

4. J.W. Weigold, S.W. Pang, Fabrication of thick Si resonators with a frontside-release etch-diffusion process, J. Microelectromech. Syst. 7 (1998).

5. J.J. Yao, N.C. MacDonald, A micromachined, single-crystal silicon, tunable resonator, J. Micromech. Microeng. 6 (1996).

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