Time resolved QCLAS measurements in pulsed cc-rf CF4/H2plasmas
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/157/i=1/a=012008/pdf
Reference19 articles.
1. Transient and stable species kinetics in pulsed cc-rf CF4/H2plasmas and their relation to surface processes
2. Time resolved measurements of the CF2rotational temperature in pulsed fluorocarbon rf plasmas
3. IRMA: A tunable infrared multicomponent acquisition system for plasma diagnostics
4. Quantum Cascade Laser
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1. Applying Quantum Cascade Laser Spectroscopy in Plasma Diagnostics;Photonics;2016-07-25
2. Applications of quantum cascade lasers in plasma diagnostics: a review;Journal of Physics D: Applied Physics;2012-10-01
3. Absolute number density and kinetic analysis of the CF radical in pulsed CF4+ H2radio-frequency plasmas;Plasma Sources Science and Technology;2012-04-01
4. Time resolved studies on pulsed fluorocarbon plasmas using chirped quantum cascade lasers;Journal of Physics D: Applied Physics;2010-03-11
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