Impact of refractive index profile of nanostructured ITO films on light extraction efficiency

Abstract

Abstract In this paper, we study composite nanostructured ITO films with different refractive index profiles, obtained by e-beam evaporation and magnetron sputtering, which can be used as a transparent conducting contacts in a wide variety of optoelectronic devices, e.g. AlInGaN light-emitting diodes. The composite ITO films that comprise of an underlying dense layer and a structured layer deposited on a glass substrate surface have been fabricated. Reflectance and transmittance spectra were measured. Numerical calculations have been utilized to obtain refractive index profiles of the studied films. Light extraction efficiencies of the studied films have been calculated.