Author:
Kotlarski G,Ivanov N,Dechev D,Valkov S,Mateev V,Marinova I
Abstract
Abstract
In the present work, the effect of the deposition time on the structure and electrical impedance of reactive DC magnetron sputtered TiN coatings was studied. The structure of the coatings and the substrates was studied using X-ray diffraction (XRD). The electrical impedance and high frequency stability of the specimens was experimentally measured and the results were indicative of whether the application of the coatings as protective layers between the electrical contact pads of electrical contact systems is feasible.