Author:
Pronin V P,Dolgintsev D M,Volpyas V A,Staritsyn M V,Kaptelov E Yu,Senkevich S V,Pronin I P
Abstract
Abstract
The paper presents the results of studies of bilayer thin ferroelectric PZT films with a lead content variation on the films thickness, formed by the method of radio-frequency magnetron deposition at different pressures of the gas mixture. It was shown that, depending on the sequence of deposition of the layers, both the structure and the dielectric parameters of the samples change.
Subject
General Physics and Astronomy
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献