Surface micromachined MEMS deformable mirror based on hexagonal parallel-plate electrostatic actuator
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/986/i=1/a=012021/pdf
Reference12 articles.
1. Correction of ocular and atmospheric wavefronts: a comparison of the performance of various deformable mirrors
2. MEMS segmented-based adaptive optics scanning laser ophthalmoscope
3. 4096-element continuous face-sheet MEMS deformable mirror for high-contrast imaging
4. Fitting capability of deformable mirror
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