1. Russian MEMS Association. http://mems-russia.ru. Accessed on 13 Jan 2020
2. Wenying, M., Changwei, M., Wang, W.: Surface micromachined MEMS deformable mirror based on hexagonal parallel-plate electrostatic actuator. J. Phys. Conf. Ser. 986 (2018)
3. MEMS Video & Image Gallery: (MESA) Sandia National Laboratories. https://www.sandia.gov/mesa/mems_info/movie_gallery.html. Accessed on 13 Jan 2020
4. PI Ceramic. https://www.piceramic.com/en/products/piezoceramic-actuators/. Accessed on 13 Jan 2020
5. Uchino, K.: Multilayer ceramic actuators. In: Encyclopedia of Materials: Science and Technology, pp. 5850–5858 (2001)