Development of the electron impact cross section set for CHF3. Monte Carlo simulation of the swarm experiments in pure CHF3and CHF3/Ar mixtures
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/44/i=1/a=015/pdf
Reference17 articles.
1. Electron cross section set for CHF3
2. Cross Section Measurements for Electron-Impact Dissociation ofCHF3into Neutral and Ionic Radicals
3. Threshold electron impact ionization of carbon tetrafluoride, trifluoromethane, methane and propane
4. Ion chemistry in trifluoromethane, CHF3
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Analysis and Modeling of Gas-Phase Processes in a CHF3 /Ar Discharge;Plasma Processes and Polymers;2011-03-25
2. Simulation of Gas-Phase Kinetics in $\hbox{CHF}_{3}:\hbox{H}_{2}: \hbox{O}_{2}$ Mixtures;IEEE Transactions on Plasma Science;2007-12
3. Electron and ion swarm data of fluorinated gases used in plasma processing;Journal of Physics: Conference Series;2007-05-01
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