Optimizing rf Power for Preferential C≡N Bond Formation in a-CNx Thin Films Prepared by rf-PECVD Technique
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/431/i=1/a=012009/pdf
Reference15 articles.
1. Prediction of New Low Compressibility Solids
2. Preparation of amorphous CNx thin films by pulsed laser deposition using a radio frequency radical beam source
3. Humidity sensing properties of CNx film by RF magnetron sputtering system
4. Influence of RF power on the electrical and mechanical properties of nano-structured carbon nitride thin films deposited by RF magnetron sputtering
5. Characterization of carbon nitride films deposited by hollow cathode discharge process
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1. Mercury removal from coal-fired flue gas by the mechanochemical S/FeS modified high sulfur petroleum coke;Fuel Processing Technology;2022-03
2. Effect of Radio Frequency Power on a-CNx Film Properties and Its Performance as Humidity Sensors;Sains Malaysiana;2018-11-30
3. Characterization of a-CNx Thin Films Prepared by RF-PECVD Technique for Humidity Sensor;Sains Malaysiana;2017-03-31
4. Formation of chemical bonds and morphological studies of a-CNx : Effects of PECVD deposition pressure;AIP Conference Proceedings;2016
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